Electrostatic clamp optimizer
US8514544B2 · kind B2 · utility
4Cited by
11References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 7, 2010 |
| Grant date | Aug 20, 2013 |
| Priority date | — |
| Expiry date | Jun 21, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/35011
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system which may be used to control, monitor and optimize an electrostatic clamp is disclosed. In one embodiment of the invention, there is a computer, a control circuit, and at least one amplifier. Also, a signal assessing circuit may be included and used to provide a sensing signal to an output signal of the control circuit. The signal assessing circuit may provide a sensing signal that can be used to monitor the capacitance of the electrostatic clamp. Further, the signal assessing circuit may include circuitry which monitors performance of the electrostatic clamp, and provide performance information to the control circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.