Patent · US Active

Method of fabricating and transferring a micro device and an array of micro devices utilizing an intermediate electrically conductive bonding layer

US8518204B2 · kind B2 · utility

104Cited by
57References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 30, 2012
Grant dateAug 27, 2013
Priority date
Expiry dateMay 17, 2032

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T156/1153
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method of fabricating and transferring a micro device and an array of micro devices to a receiving substrate are described. In an embodiment, an electrically insulating layer is utilized as an etch stop layer during etching of a p-n diode layer to form a plurality of micro p-n diodes. In an embodiment, an electrically conductive intermediate bonding layer is utilized during the formation and transfer of the micro devices to the receiving substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.