Microelectromechanical resonators having piezoelectric layers therein that support actuation and sensing through a longitudinal piezoelectric effect
US8519598B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 3, 2011 |
| Grant date | Aug 27, 2013 |
| Priority date | — |
| Expiry date | Mar 22, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/241
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Microelectromechanical resonators include a resonator body having a first piezoelectric layer on a upper surface thereof, which is configured to support actuation and sensing through a transverse piezoelectric effect (e31), and a second piezoelectric layer on at least a portion of a first sidewall thereof, which is configured to support actuation and sensing through a longitudinal piezoelectric effect (e33), where e33 is greater than e31. These resonators may further include a first bottom electrode extending between the first piezoelectric layer and the upper surface of the resonator body and a second bottom electrode extending between the second piezoelectric layer and the first sidewall of the resonator body. These first and second bottom electrodes may be contiguous as a single bottom electrode and the first and second piezoelectric layers may be contiguous as a single piezoelectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.