Optical scanning apparatus configured to deflect and scan laser beam by using MEMS mirror
US8520282B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Dec 19, 2008 |
| Grant date | Aug 27, 2013 |
| Priority date | — |
| Expiry date | Sep 13, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/105
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
During one cycle of reciprocating operation of a MEMS mirror, a light receiving sensor detects a falling time at which a laser beam reflected by an upstream-of-sensor mirror and scanned in one direction passes an edge of a regulation portion, and a rising time at which the laser beam scanned in the other opposed direction passes the edge of the regulation portion. A controller executes an arithmetic operation on the basis of the two times detected by the light receiving sensor and controls the operation of the MEMS mirror, which is performed by the driver, such that the detected two times are held at respective setting times.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.