Patent · US Active

Pressure sensor and use thereof in a fluid tank

US8522620B2 · kind B2 · utility

1Cited by

26References

11Claims

0Family size

Assignee

Silicon Micro Sensors GmbH · DE

Inventors

Jens Koehler · Thiendorf, DE
Lars Petersen · Dresden, DE
Sebastian Hagedorn · Dresden, DE

Key dates

Filing date	Oct 15, 2010
Grant date	Sep 3, 2013
Priority date	—
Expiry date	Oct 27, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2224/48091
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure sensor in contact with an aggressive fluid for a pressure measurement has a board with a pressure passage. The pressure passage is closed on one side by a sensor chip as a pressure sensing element. The board also mounts an integrated circuit and electrical contacts for electrical contacting of the pressure sensor. At least the on board arranged pressure sensing element as well as the integrated circuit are tightly enclosed by a capper made of a fluid resistant material in connection with the board, and are arranged in an encasing cavity formed by the capper and the board for fluid resistant protection.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.