Patent · US Active

Electrical connecting apparatus and testing system using the same

US8525539B2 · kind B2 · utility

4Cited by

5References

13Claims

0Family size

Assignee

Kabushiki Kaisha Nihon Micronics · JP

Inventors

Kenichi Washio · Tokyo, JP
Masashi Hasegawa · Shizuoka, JP

Key dates

Filing date	Oct 19, 2010
Grant date	Sep 3, 2013
Priority date	—
Expiry date	Sep 19, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/07378
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An embodiment of an electrical connecting apparatus includes a chip unit having a plurality of electronic components arranged on the upper side of a chip supporting body, a probe unit having a plurality of contacts arranged on the lower side of a probe supporting body, and a connecting unit arranged between the chip unit and the probe unit and having a connecting member supporting body and a plurality of connecting members electrically connecting the chip unit to the probe unit. The chip unit, the probe unit and the connecting unit are vacuum-coupled.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.