Patent · US Active

Force actuator

US8528461B2 · kind B2 · utility

0Cited by

7References

32Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Andreas Bertele · Oberkochen, DE
Peter Vogt · Boulder, US

Key dates

Filing date	Aug 22, 2008
Grant date	Sep 10, 2013
Priority date	—
Expiry date	Sep 26, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG02B27/0068
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Actuator arrangements are disclosed. An actuator arrangement can include a first fluidic-based actuator device designed to exert a first force on a first location of a body associated with the first actuator device. An actuator arrangement can also include a second fluidic-based actuator device designed to exert a second force on a second location of the body associated with the first actuator device. The distance between the first and second locations can be small. The maximum value of the second force can be less than the maximum value of the first force.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.