Micro valve, method for producing a micro valve, as well as micro pump
US8528591B2 · kind B2 · utility
11Cited by
19References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 4, 2008 |
| Grant date | Sep 10, 2013 |
| Priority date | — |
| Expiry date | Jun 23, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7879
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A micro valve includes a first valve chamber and a second valve chamber as well as a closing element, which is adjustable between an opening position, in which the valve chambers are connected to each other, and a closing position in which the valve chambers are separated from each other. A reference chamber is provided, which is delimited by the closing element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.