Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
US8529024B2 · kind B2 · utility
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5Claims
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Key dates
| Filing date | Oct 11, 2011 |
| Grant date | Sep 10, 2013 |
| Priority date | — |
| Expiry date | Oct 11, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/877
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric element comprising an electrode film and a piezoelectric layer provided above the electrode film. The electrode film is preferentially oriented with (111) surface and contains platinum as the main component. The electrode film has a rhombohedral system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.