Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application

US8529130B2 · kind B2 · utility

Assignee

• VISTEC ELECTRON BEAM GMBH · DE

Inventors

• Gerhard Schubert · Jena, DE
• Christian Jackel · Landsberg, DE
• Ulf-Carsten Kirschstein · Jena, DE
• Michael Boehm · Waukesha, US
• René Bauer · Schweinfurt, DE
• Gerd Harnisch · Jena, DE
• Thomas Peschel · Jena, DE
• Stefan Risse · Jena, DE
• Christoph Schenk · Icking, DE

Key dates

• Filing date: Sep 3, 2009
• Grant date: Sep 10, 2013
• Expiry date: Jan 3, 2031

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F16C39/00
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element.