Ceramic substrate material, method for the production and use thereof, and antenna or antenna array

US8529780B2 · kind B2 · utility

Assignee

• Micro Systems Engineering GmbH · DE

Inventors

• Dieter Schwanke · Hof, DE
• Mirco Harnack · Starnberg, DE
• Achim Bittner · Heilbronn, DE
• Ulrich Schmid · Wien, AT

Key dates

• Filing date: Sep 18, 2009
• Grant date: Sep 10, 2013
• Expiry date: Jul 1, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/24562
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

The invention relates to a ceramic substrate material having a first layer having a cavity structure formed therein, and at least one sealing layer situated on at least a part of the cavity structure. The first layer comprises at least one first component made of a crystalline ceramic material and/or a glass material as a matrix, the first layer containing a second component made of a further crystalline ceramic material, with selected mantle areas of the crystals and/or crystal agglomerates of the second component being etched out in such a way that the cavity structure is provided (preferably in the form of a pore and/or tube structure). The sealing layer seals the surface of the first layer in the areas on which it is situated (e.g., above the cavity structure), allowing application of thin-film structures to the cavity structure.