Low volatility polymers for two-stage deposition processes
US8529993B2 · kind B2 · utility
22Cited by
40References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 30, 2007 |
| Grant date | Sep 10, 2013 |
| Priority date | — |
| Expiry date | Jul 5, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/138
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
This invention relates to materials and processes for the preparation of high quality layers, for example for the fabrication of optical devices such as waveguides. In particular, the invention relates to the use of low volatility polymer materials for the deposition of high quality layers on large area substrates via a two-stage process, for example extrude-and-spin.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.