Electron beam scanner
US8530849B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 22, 2009 |
| Grant date | Sep 10, 2013 |
| Priority date | — |
| Expiry date | Jun 12, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2235/086
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron beam scanner includes a stationary source producing an electron beam and a detector positioned to partially circumscribe a scan field, the detector divided into a pair of detector rings arranged adjacent to one another and separated by a gap extending at least partially about a circumference of the detector. The electron beam scanner also includes a target arranged concentric with the detector and located opposite the detector across the scan field, the target having end portions circumferentially overlapping the detector and radially aligned with the gap between the detector rings, such that when the electron beam impinges on the target the target transmits radiation through the gap across the scan field to an associated section of the detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.