Patent · US Active

Beam device system comprising a particle beam device and an optical microscope

US8530856B2 · kind B2 · utility

6Cited by

12References

44Claims

0Family size

Assignee

Carl Zeiss NTS GmbH · US

Inventors

Bernd Spruck · Heubach, DE
Martin Edelmann · Aalen, DE
John Craven · London, GB
Robert Taylor · Cambridge, GB
Martin Kühner · Bad Klosterlausnitz, DE

Key dates

Filing date	Nov 11, 2008
Grant date	Sep 10, 2013
Priority date	—
Expiry date	Sep 19, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2608
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A beam device, in particular a particle beam device, for analyzing an object is provided, as well as a system comprising a particle beam device and an optical microscope for optically analyzing an object. The beam device simplifies the exchange and reduces the time of the exchange of objects to be examined. The beam device includes at least one beam generator that generates a beam, at least one objective lens that focuses the beam on an object arranged in a holding element. The objective lens comprises at least one connecting element. The holding element may be connected to the connecting element so that the holding element is removable from the connecting element for modification of the object. Alternatively, the holding element may be mounted to a beam column.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.