Microscopic total reflection measuring apparatus
US8531674B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2010 |
| Grant date | Sep 10, 2013 |
| Priority date | — |
| Expiry date | Jun 7, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0016
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An object of the present invention is to provide a total reflection measuring apparatus which, while visually observing a specific minute area of a measurement object, is capable of efficiently obtaining optical data on the basis of the total reflection measurement. A microscopic total reflection measuring apparatus of the present invention comprises a Cassegrain mirror 12 having a Cassegrain primary mirror 16 and a Cassegrain secondary mirror 18, which condenses an incident light beam 30 on a measurement object 20 by making an incident light beam successively reflected by the secondary mirror 18 and the primary mirror 16, and which obtains a reflected light beam 32 from the measurement object 20 by making the reflected light beam 32 successively reflected by the primary mirror 16 and the secondary mirror 18. And, a total reflection prism 14 is arranged below the Cassegrain secondary mirror 18. And the incident light beam includes a visible light beam for visual observation and a measurement light beam for acquisition of analysis information, and present invention comprises a visible light filter which separates at least one of the incident light beam to the total reflection prism …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.