Compensated MEMS FTIR spectrometer architecture
US8531675B2 · kind B2 · utility
5Cited by
3References
20Claims
0Family size
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Key dates
| Filing date | Sep 8, 2010 |
| Grant date | Sep 10, 2013 |
| Priority date | — |
| Expiry date | Oct 21, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/45
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.