Frequency-shifting interferometer with selective data processing
US8531677B2 · kind B2 · utility
2Cited by
4References
19Claims
0Family size
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Key dates
| Filing date | May 18, 2011 |
| Grant date | Sep 10, 2013 |
| Priority date | — |
| Expiry date | Oct 13, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/02069
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A frequency-shifting interferometer is arranged for measuring an optical profile of a test object with a continuously tunable light source. A succession of the interference images of the test object are captured together with a measure of the beam frequencies at which interference images are formed. A limited number of the captured interference images of the test object are selected so that the monitored beam frequencies approximately match a predetermined beam frequency spacing pattern. Further processing proceeds based on the selected interference images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.