Sensor apparatus and method therefor
US8534117B2 · kind B2 · utility
1Cited by
14References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2010 |
| Grant date | Sep 17, 2013 |
| Priority date | — |
| Expiry date | Dec 16, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor apparatus includes a metal oxide semiconductor (“MOS”) sensor with a gas-sensing surface normally having a first sensitivity to a first species of flammable gas and a second sensitivity to a second, different species of flammable gas. A selective sensitivity-enhancement layer is disposed on the gas-sensing surface such that the first sensitivity becomes increased and the second sensitivity remains substantially unchanged.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.