Additives to silane for thin film silicon photovoltaic devices
US8535760B2 · kind B2 · utility
2Cited by
9References
13Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 31, 2010 |
| Grant date | Sep 17, 2013 |
| Priority date | — |
| Expiry date | Jul 17, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Chemical additives are used to increase the rate of deposition for the amorphous silicon film (αSi:H) and/or the microcrystalline silicon film (μCSi:H). The electrical current is improved to generate solar grade films as photoconductive films used in the manufacturing of Thin Film based Photovoltaic (TFPV) devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.