Apparatus and method of obtaining field by measurement
US8536862B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 28, 2008 |
| Grant date | Sep 17, 2013 |
| Priority date | — |
| Expiry date | May 10, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/0385
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Above a sample (9) having magnetic domains, a distribution of magnetic force in a measurement plane (91) is obtained as a magnetic force image using a MFM, an auxiliary magnetic force image is obtained by performing measurement in a measurement plane (92) away from the measurement plane (91) by a distance d, and a difference between them is divided by the distance d to obtain a magnetic force gradient image. The magnetic force image and the auxiliary magnetic force image are Fourier transformed and substituted into a three-dimensional field obtaining equation derived from a general solution of the Laplace equation, and the three-dimensional field indicating the magnetic force is obtained. A state of the magnetic domains at the surface (93) of the sample (9) can be obtained with high accuracy by obtaining the three-dimensional field.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.