MEMS gyros with quadrature reducing springs
US8539832B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2010 |
| Grant date | Sep 24, 2013 |
| Priority date | — |
| Expiry date | Jul 21, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5712
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Spring set configurations that include an advantageous combination of spring geometries are disclosed. Spring elements having curved and straight sections, orientation of spring element anchor points with respect to the common radius, orientation of spring element segments with respect to a specific axis, balance of the length of spring elements about the common radius, and mass balance about the common radius can be used to mitigate unwanted out of plane motion. The spring set provides planar motion while reducing undesired out of plane motion making MEMS devices substantially insensitive to the process-induced etch angle variations of the spring elements. The spring set can be used in a MEMS gyro device which maintains the desired resonant modes and consistently low quadrature error even with process variations in manufacturing causing undesirable etch angles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.