Process for producing an amorphous carbon film
US8541068B2 · kind B2 · utility
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4References
18Claims
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Key dates
| Filing date | Mar 27, 2006 |
| Grant date | Sep 24, 2013 |
| Priority date | — |
| Expiry date | Jun 6, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/466
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The process for producing an amorphous carbon film of the present invention is a process for producing an amorphous carbon film comprising contacting a surface of a substrate S with bubbles B which have been formed in a liquid L containing an organic compound and inside which plasma has been generated, so as to form an amorphous carbon film on the surface of the substrate S, and the liquid L contains one or more selected from phenols and alcohols having a carbon number of from 1 to 12. According to the present invention, a hard amorphous carbon film can be formed easily.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.