Method for automatically adjusting the levels of illumination sources in an optical measurement machine
US8542297B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 5, 2011 |
| Grant date | Sep 24, 2013 |
| Priority date | — |
| Expiry date | Mar 19, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N23/74
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A process for pre-calibrating illumination sources permits illumination light intensities to be set to a near optimal level during training of an optical inspection system. Applicants have found that the illumination source intensities for a category of illuminators are sufficiently constant from machine to machine that the data collected during calibration of an illumination source on a machine using a particular type of source may be used on other machines of the same type using the same type of illumination source when combined with the reticle light intensity data for different zoom magnification's of the particular machine being used. That is, using known data for particular machine and the illumination source light intensity data for the same type of machine and illumination source permits accurate presetting of an illumination source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.