Laser scanning microscope having a microelement array
US8542438B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 2010 |
| Grant date | Sep 24, 2013 |
| Priority date | — |
| Expiry date | Jun 29, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/008
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser scanning microscope includes a stage that moves a sample placed thereon, a laser light source that emits laser light, a line-focus optical system that focuses the laser light into a line shape, a DMD including a plurality of movable micromirrors that are arrayed in the lengthwise direction of the line shape and that reflect the line-focused laser light, an irradiation optical system that irradiates the sample with the laser light reflected by the DMD, and a photodetector in which a plurality of channels for detecting light from the sample are arrayed in one column, wherein the DMD is driven so that a plurality of micromirrors simultaneously reflect the laser light and so that micromirrors that reflect the laser light are sequentially switched, wherein the stage moves the sample in a direction crossing the array direction of a plurality of light spots formed on the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.