Patent · US Active

Vertical accelerometer

US8544326B2 · kind B2 · utility

57Cited by
8References
8Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMay 20, 2010
Grant dateOct 1, 2013
Priority date—
Expiry dateFeb 7, 2032

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01P15/125
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Provided is a vertical accelerometer for measuring acceleration applied perpendicular to a substrate to increase sensitivity thereof. The vertical accelerometer includes a substrate, and a plurality of unit vertical accelerometers, each having a detection mass disposed on the substrate to be rotated by acceleration applied perpendicular to the substrate, and a detection electrode formed at the detection mass. Here, the unit vertical accelerometers are provided to be in contact with the detection electrodes to detect the acceleration through variation in capacitance due to variation in area in which the contacted detection electrodes overlaps each other.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.