Coupling apparatus for chemical fluid flow channel
US8544500B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 16, 2011 |
| Grant date | Oct 1, 2013 |
| Priority date | — |
| Expiry date | Mar 27, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87925
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
This invention provides a chemical fluid flow channel coupling apparatus that couples and decouples chemical fluid flow channels. The coupling apparatus includes a first coupling unit; and a second coupling unit. The first coupling unit includes a first chemical fluid valve member chamber and a first valve member configured to open and close a first chemical fluid opening communicated with the first chemical fluid flow channel; and a purging fluid supply control valve configured to open and close the purging fluid supply flow channel. The second coupling unit includes a second chemical fluid valve member chamber, and a second valve member configured to open and close a second chemical fluid opening connected to the second chemical fluid flow channel; and a purging fluid discharge control valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.