Laser processing apparatus and processing method employed therein
US8546722B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 18, 2009 |
| Grant date | Oct 1, 2013 |
| Priority date | — |
| Expiry date | Apr 19, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2101/40
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A laser processing apparatus 1 includes a processing light source 3 emitting processing light; an observation light emitting unit 4 emitting observation light; optical fibers 19 conducting light having a plurality of wavelengths generated at an electronic component 2; a detecting unit 5 detecting the light conducted by the optical fibers 19; and a control unit 31 controlling a light emitting state of the processing light emitting unit 3. The optical fibers 19 are categorized into four groups, and disposed so as to surround an optical fiber 18 conducting the processing light. The optical fibers 19 categorized into the four groups are capable of conducting the observation light to the electronic component 2 every group.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.