Micromechanical rotation rate sensor with a coupling bar and suspension spring elements for quadrature suppression

US8549919B2 · kind B2 · utility

Assignee

• Continental Teves AG & Co. OHG · DE

Inventors

• Stefan Günthner · Frankfurt am Main, DE
• Bernhard Schmid · Friedberg, DE

Key dates

• Filing date: Aug 18, 2008
• Grant date: Oct 8, 2013
• Expiry date: Nov 28, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/574
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical rotation rate sensor including at least one substrate, wherein the base surface of the substrate is oriented parallel to the x-y plane of a Cartesian coordinate system, at least two seismic masses and in each case at least one suspension spring element for suspending the seismic mass from the substrate, wherein the at least two seismic masses are coupled to one another by at least one coupling bar, and at least one of the suspension spring elements includes at least two bar sections, which, in the undeflected state, are oriented essentially parallel to one another or are at an angle of less than 45° with respect to one another, and one or more connecting sections, which connect the bar sections to one another, wherein the bar sections can be displaced relative to one another in their longitudinal direction.