Device for detecting temperature variations in a chip
US8550707B2 · kind B2 · utility
2Cited by
5References
27Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 30, 2010 |
| Grant date | Oct 8, 2013 |
| Priority date | — |
| Expiry date | Aug 11, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K2217/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for detecting temperature variations of the substrate of an integrated circuit chip, including, in the substrate, implanted resistors connected as a Wheatstone bridge, wherein each of two first opposite resistors of the bridge is covered with an array of metal lines parallel to a first direction, the first direction being such that a variation in the substrate stress along this direction causes a variation of the unbalance value of the bridge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.