Forming a funnel-shaped nozzle
US8551692B1 · kind B1 · utility
9Cited by
2References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 30, 2012 |
| Grant date | Oct 8, 2013 |
| Priority date | — |
| Expiry date | Apr 30, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/11
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
Techniques are provided for making a funnel-shaped nozzle in a semiconductor substrate. The funnel-shaped recess includes a straight-walled bottom portion and a curved top portion having a curved sidewall gradually converging toward and smoothly joined to the straight-walled bottom portion, and the curved top portion encloses a volume that is substantially greater than a volume enclosed by the straight-walled bottom portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.