Calibration systems and methods for tracer gas leak detection
US8555704B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 20, 2008 |
| Grant date | Oct 15, 2013 |
| Priority date | — |
| Expiry date | Apr 5, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/207
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Tracer gas leak detection is provided by a calibration system with a gas leak detector having a test port for receiving a sample containing a tracer gas and coupled to a vacuum pump; a calibrated leak for a calibration sample containing the tracer gas; a mass filter coupled to the test port for receiving the test sample in an operating mode, coupled to the calibrated leak through a calibrated leak valve for receiving the calibration sample in a calibration mode, having controllable transmission of the tracer gas and providing a filtered sample; detector detecting the tracer gas in the filtered sample; a programmable gain element providing a measured value of leak rate in response to the detector signal; and a controller configured, in response to a mode control signal, to operate the leak detector in the calibration mode over two or more working ranges using the calibrated leak.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.