Flow rate ratio variable type fluid supply apparatus
US8555920B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2007 |
| Grant date | Oct 15, 2013 |
| Priority date | — |
| Expiry date | Jun 10, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87539
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A flow rate ratio variable type fluid supply apparatus includes a flow rate control system supplying gas of flow rate Q that is diverted to first flow diverting pipe passage and second flow diverting pipe passage with prescribed flow rates Q1/Q0 so gas is supplied to a chamber, and a first orifice having opening area S1 is installed on the first flow diverting passage, and the second flow diverting passage is connected to a plurality of branch pipe passages connected in parallel, orifices having opening area installed on the branch passages, and open/close valves installed on all, or some of, the branch passages so gas is diverted to flow diverting passages with flow rate ratio Q1/Q0 equivalent to the ratio of the first orifice and the total opening area S2o of flow passable orifices of the second flow diverting passage by regulating total opening area of the flow passable orifices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.