Deposition system with electrically isolated pallet and anode assemblies

US8557093B2 · kind B2 · utility

Assignee

• SUNPOWER CORPORATION · US

Inventors

• Peter John Cousins · Menlo Park, US
• Hsin-Chiao Luan · Palo Alto, US
• Thomas Pass · San Jose, US
• John Ferrer · Mason, US
• Rex Gallardo · Sta. Rosa, PH
• Stephen F. Meyer · Santa Clara, US

Key dates

• Filing date: Mar 22, 2007
• Grant date: Oct 15, 2013
• Expiry date: Jan 13, 2031

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68771
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A system for substrate deposition. The system includes a wafer pallet and an anode. The wafer pallet has a bottom and a top. The top of the wafer pallet is configured to hold a substrate wafer. The anode has a substantially fixed position relative to the wafer pallet and is configured to move with the wafer pallet through the deposition chamber. The anode is electrically isolated from the substrate wafer.