Position control with compensation for thermal cycling of a workpiece support
US8558146B2 · kind B2 · utility
0Cited by
7References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2008 |
| Grant date | Oct 15, 2013 |
| Priority date | — |
| Expiry date | Jun 8, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B2220/2516
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Embodiments of the present invention are directed to establishing a desired position control over a workpiece by compensating for thermal cycling affecting a member supporting the workpiece during processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.