Method to test the measurement accuracy of at least one magnetic field sensor using a semiconductor chip having a measurement coil

US8558537B2 · kind B2 · utility

Assignee

• Micronas GmbH · DE

Inventors

• Martin Bayer · Hessisch Oldendorf, DE
• Hans-Jörg Fink · Glückstadt, DE

Key dates

• Filing date: Dec 3, 2007
• Grant date: Oct 15, 2013
• Expiry date: Sep 14, 2031

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/014
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In a process for testing the measurement accuracy of at least one magnetic field sensor, in particular during manufacturing, a semiconductor wafer that has at least two semiconductor chips is provided. A measurement coil is integrated into at least one first semiconductor chip, and a magnetic field-sensitive electric circuit is integrated into at least one second semiconductor chip that forms the magnetic field sensor. The first semiconductor chip, of which at least one is present, is positioned at an exciter coil that is supplied with current in order to generate a reference magnetic field. With the aid of the measurement coil a first measured value that is dependent on the magnetic flux density is acquired and the current in the exciter coil is adjusted depending on the first measured value. The second semiconductor chip, of which at least one is present, is positioned at the exciter coil. With the aid of the electronic circuit a second measured value that is dependent on the magnetic flux density is acquired and compared with a reference value range.