Patent · US Active

Micro focal-length collimation based micro-cavity measuring method and detecting equipment thereof

US8559023B2 · kind B2 · utility

1Cited by

5References

9Claims

0Family size

Assignee

HARBIN INSTITUTE OF TECHNOLOGY · CN

Inventors

Jiubin Tan · Jingwei, CN
Fei Wang · Beijing, CN
Jiwen Cui · Jingwei, CN

Key dates

Filing date	Nov 12, 2009
Grant date	Oct 15, 2013
Priority date	—
Expiry date	Jun 14, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01B11/007
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micro-cavity measuring method and equipment based on micro focal-length collimation are provided. The equipment can be used to measure irregular micro-cavities and “sub-macro” micro-cavities. Wherein a cylindrical or spherical lens with micro focal-length is combined with a fiber probe(11,12) to form a collimating and imaging optical system of a point light source(8), and the collimating and imaging optical system transforms the two or three dimensional movement of the fiber probe(11,12) into a change in image ultra-highly sensitively. A lot of advantages are obtained, i.e., micro measuring force, high aspect ratio, easy miniaturization, high resolution, simple construction and high speed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.