Fabry-perot optical sensor and method of manufacturing the same
US8559770B2 · kind B2 · utility
13Cited by
13References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2006 |
| Grant date | Oct 15, 2013 |
| Priority date | — |
| Expiry date | Feb 1, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/093
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Fabry-Perot optical sensor for sensing a parameter such as pressure or the like is provided. The sensor includes a lead optical fiber from the end of which projects a spacer having an end surface curving inwardly. A diaphragm extends across the forward end of the spacer. The diaphragm is flexible in response to the parameter to be measured and defines a forward reflector of the Fabry-Perot cavity within the optical sensor. A method for manufacturing such a sensor is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.