Patent · US Active

Low resistivity contact

US8564129B2 · kind B2 · utility

5Cited by
2References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 3, 2012
Grant dateOct 22, 2013
Priority date
Expiry dateAug 3, 2032

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N10/852
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Embodiments of a low resistivity contact to a semiconductor structure are disclosed. In one embodiment, a semiconductor structure includes a semiconductor layer, a semiconductor contact layer having a low bandgap on a surface of the semiconductor layer, and an electrode on a surface of the semiconductor contact layer opposite the semiconductor layer. The bandgap of the semiconductor contact layer is in a range of and including 0 to 0.2 electron-volts (eV), more preferably in a range of and including 0 to 0.1 eV, even more preferably in a range of and including 0 to 0.05 eV. Preferably, the semiconductor layer is p-type. In one particular embodiment, the semiconductor contact layer and the electrode form an ohmic contact to the p-type semiconductor layer and, as a result of the low bandgap of the semiconductor contact layer, the ohmic contact has a resistivity that is less than 1×10−6 ohms·cm2.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.