Integrated circuit device test apparatus
US8564304B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 23, 2010 |
| Grant date | Oct 22, 2013 |
| Priority date | — |
| Expiry date | Mar 27, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2893
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A carrier and a frame, movable relative to one another in both an x-y direction and a z direction provide a test bed for MEMS like integrated circuits. The carrier includes receptacles mounted on a test substrate. The frame includes pins projecting from a surface of a plate. The plate has open areas. In a test sequence, the frame and carrier are oriented so that the cavities are exposed by open areas of the plate; a tool is used to place a device to be tested in each cavity; the frame and carrier are moved into alignment and toward one another to bring the pin ends into contact with the devices in the cavities. Then a test cycle is carried out. Following the test cycle the process is reversed to expose the devices for a pick-and-place tool to remove and bin the tested devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.