Method of fabricating a heated quartz crystal resonator
US8567041B1 · kind B1 · utility
5Cited by
15References
27Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 15, 2011 |
| Grant date | Oct 29, 2013 |
| Priority date | — |
| Expiry date | Sep 6, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4908
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A heated resonator includes a base substrate, a piezoelectric piece having a thickness and a top side and a bottom side, a first electrode on the top side, a second electrode opposite the first electrode on the bottom side, an anchor connected between the piezoelectric piece and the base substrate, and a heater on the piezoelectric material. A thermal resistor region in the piezoelectric piece is between the heater and the anchor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.