Optical tactile sensors
US8567257B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 19, 2011 |
| Grant date | Oct 29, 2013 |
| Priority date | — |
| Expiry date | Dec 19, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor for sensing pressure is disclosed. The sensor may be a pressure sensor for sensing pressure, or a tactile sensor for sensing tactile events through pressure measurement. In one aspect, the sensor includes at least one pressure sensor having at least one VCSEL on a substrate. It further includes a compressible sensor layer covering a top surface of the at least one VCSEL, and a reflecting element covering a top surface of the sensor layer. A method of manufacturing such a sensor is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.