Patent · US Active

Optical tactile sensors

US8567257B2 · kind B2 · utility

46Cited by
11References
24Claims
0Family size

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Key dates

Filing dateDec 19, 2011
Grant dateOct 29, 2013
Priority date
Expiry dateDec 19, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01L1/24
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A sensor for sensing pressure is disclosed. The sensor may be a pressure sensor for sensing pressure, or a tactile sensor for sensing tactile events through pressure measurement. In one aspect, the sensor includes at least one pressure sensor having at least one VCSEL on a substrate. It further includes a compressible sensor layer covering a top surface of the at least one VCSEL, and a reflecting element covering a top surface of the sensor layer. A method of manufacturing such a sensor is also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.