Apparatus and method for the condensed phase production of trisilylamine
US8568682B2 · kind B2 · utility
2Cited by
3References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 4, 2012 |
| Grant date | Oct 29, 2013 |
| Priority date | — |
| Expiry date | Oct 4, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B21/087
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The present invention is directed to a condensed phase batch process for synthesis of trisilylamine (TSA). An improved synthesis method that incorporates a solvent to help promote a condensed-phase reaction between ammonia gas (or liquid) and liquified monochlorosilane (MCS) in good yields is described. This method facilitates the removal of the byproduct waste with little to no reactor down time, substantial reduction of down-stream solids contamination and high-purity product from first-pass distillation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.