Organic thin film forming method, auxiliary agent for forming an organic thin film, and solution for forming an organic thin film
US8568836B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2005 |
| Grant date | Oct 29, 2013 |
| Priority date | — |
| Expiry date | Nov 21, 2027 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2217/76
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An organic thin film forming method for forming an organic thin film on a substrate surface comprising: contacting the substrate with a solution for forming an organic thin film obtained from an auxiliary agent for forming an organic thin film obtained by mixing a metal surfactant (1) having at least one hydrolytic group and a compound capable of interacting with the metal surfactant (1), and a metal surfactant (2) having at least one hydrolytic group, in an organic solvent, wherein a solution for forming an organic thin film is used in which the moisture content has been adjusted or maintained to be within a predetermined range; and, an auxiliary agent for forming an organic thin film and a solution for forming an organic thin film used in this method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.