Patent · US Active

Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector

US8569677B2 · kind B2 · utility

0Cited by

11References

15Claims

0Family size

Assignee

The Regents of the University of California · US

Inventors

Oliver Gessner · Albany, US
Oleg A. Kornilov · Berlin, DE
Russell Wilcox · Corona, US

Key dates

Filing date	Jul 26, 2010
Grant date	Oct 29, 2013
Priority date	—
Expiry date	Dec 15, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01J3/2803
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.