Induction heated buffer gas heat pipe for use in an extreme ultraviolet source
US8569724B2 · kind B2 · utility
4Cited by
1References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 14, 2011 |
| Grant date | Oct 29, 2013 |
| Priority date | — |
| Expiry date | Apr 25, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B6/105
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The successful use of lithium vapor in an extreme ultraviolet (EUV) light source depends upon an intense localized heat source at the center of conical structures that evaporate, condense and re-supply liquid lithium. Induction heating of a hollow structure with toroidal topology via an internal helical field coil, can supply intense heat at its innermost radius. The resulting slim radio frequency heated structure has high optical transmission from a central EUV producing plasma to collection mirrors outside of the structure, improving EUV source efficiency and reliability.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.