Patent · US Active

Scanning mirror device

US8570502B2 · kind B2 · utility

6Cited by

9References

16Claims

0Family size

Assignee

Carl Zeiss AG · DE

Inventors

Stefan Richter · Seattle, US
Veljko Milanovic · Richmond, US
Günter Rudolph · Jork, DE
Michel Stutz · Munich, DE
Gerhard Krampert · Jena, DE

Key dates

Filing date	Feb 20, 2012
Grant date	Oct 29, 2013
Priority date	—
Expiry date	Feb 20, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG02B26/105
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

There is provided a scanning mirror device with a microsystem scanning mirror which is mounted rotatably about at least one axis, and a detection module which has a light source which emits a light beam, and a position detector, wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.