Reticle pod having function of gas exchange
US8573264B2 · kind B2 · utility
0Cited by
7References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 3, 2011 |
| Grant date | Nov 5, 2013 |
| Priority date | — |
| Expiry date | Jul 30, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67393
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A reticle pod for storing reticles, into the gas channel of partition of which gas is filled through a gas inlet, wherein strong gas flow is formed around the pellicle film and the pellicle film expands outward in accordance with the Bernoulli's principle; when no gas is filled in through the gas inlet, the pellicle film contracts inward. Therefore, by turning on and shutting off the gas inlet valve, the pellicle film will be set in a breathing motion for the gas inside the pellicle film to be exchanged.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.