Vacuum control valve and vacuum control system
US8573560B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2012 |
| Grant date | Nov 5, 2013 |
| Priority date | — |
| Expiry date | Mar 6, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/777
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention provides a vacuum control valve configured to control the vacuum pressure in the vacuum chamber. The vacuum control valve includes a control valve main body, an operation unit, a cylinder, a biasing unit, and a bellofram. The operation unit and the cylinder include a valve opening manipulation chamber and a shutoff load generation chamber. The shutoff load generation chamber is configured to have a common axial center line with the valve opening manipulation chamber and to generate a load applied to the operation unit in a direction for reducing the lift in accordance with a supply of the working fluid. And the shutoff load generation chamber may be formed in an interior of the rod.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.