Concentration sensor device and concentration detecting method
US8578761B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 2009 |
| Grant date | Nov 12, 2013 |
| Priority date | — |
| Expiry date | Aug 20, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/28
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A concentration sensor device includes a sensor unit, a substrate, and a sedimentation limit unit. The sensor unit detects a concentration of a specific component contained in liquid. The substrate has a face to which the sensor unit is arranged. The sedimentation limit unit is integrally arranged with the sensor unit or arranged at an upstream side of the sensor unit in a flowing direction of the liquid. The sedimentation limit unit is configured to prevent sedimentation of a foreign object on the sensor unit. The sedimentation limit unit includes a piezoelectric element to vibrate when electricity is supplied so as to promote the foreign object to be separated from the sensor unit. The substrate has a recess recessed in a thickness direction of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.