Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus

US8580130B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Samuel S. Mao · Castro Valley, US
• Costas P. Grigoropoulos · Berkeley, US
• David Hwang · Perrysburg, US
• Andrew M. Minor · Corona, US

Key dates

• Filing date: Dec 16, 2008
• Grant date: Nov 12, 2013
• Expiry date: Apr 19, 2030

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T156/1158
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

Laser-assisted apparatus and methods for performing nanoscale material processing, including nanodeposition of materials, can be controlled very precisely to yield both simple and complex structures with sizes less than 100 nm. Optical or thermal energy in the near field of a photon (laser) pulse is used to fabricate submicron and nanometer structures on a substrate. A wide variety of laser material processing techniques can be adapted for use including, subtractive (e.g., ablation, machining or chemical etching), additive (e.g., chemical vapor deposition, selective self-assembly), and modification (e.g., phase transformation, doping) processes. Additionally, the apparatus can be integrated into imaging instruments, such as SEM and TEM, to allow for real-time imaging of the material processing.